Influence of ion energy on the surface morphology of tetrahedral amorphous carbon films

被引：2
|
作者：
Chen, ZY [1 ]
Zhao, JP
Yu, YH
Wang, X
Yang, SQ
Shi, TS
Liu, XH
Luo, EZ
Xu, JB
Wilson, IH
机构：
[1] Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, Shanghai 200050, Peoples R China
[2] Chinese Univ Hong Kong, Dept Elect Engn, Shatin, New Territories, Hong Kong
来源：
JOURNAL OF MATERIALS SCIENCE LETTERS | 1998年 / 17卷 / 04期
关键词：
D O I：
10.1023/A:1006502210376
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
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页码：335 / 337
页数：3
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