Modeling and simulation for electrostatically driven micro-electro-mechanical (MEMS) system

In this paper, we report a novel approach for modeling and estimating the performance of an electrostatically driven microelectromechanical system (MEMS) In this work, a virtual MEMS device is generated from the process recipe out of the mask layout. Since the MEMS system is a coupled problem, the mechanical deformation should be determined from the calculated electrostatic force which in turn depends on the deformation calculated at the previous step. Laplace equation and the dynamic equation are solved with different numerical methods respectively. Our modeling and simulation methodology was verified with a test vehicle including a comb-drive. Fringing field effects were also taken into account for the explanation of the electrostatic force. Finally our simulation results were compared with the experimental data from the prior art.