Tunnel field effect transistor with increased ON current, low-k spacer and high-k dielectric

被引:111
|
作者
Anghel, Costin [1 ]
Chilagani, Prathyusha [1 ]
Amara, Amara [1 ]
Vladimirescu, Andrei [1 ]
机构
[1] ISEP, F-75270 Paris, France
关键词
field effect transistors; high-k dielectric thin films; low-k dielectric thin films; tunnelling;
D O I
10.1063/1.3367880
中图分类号
O59 [应用物理学];
学科分类号
摘要
An improved double-gate tunnel field-effect transistor structure with superior performance is proposed. The originality consists in the introduction of a low-k spacer that is combined with a high-k gate dielectric. Numerical simulations demonstrate that the use of the low-k spacer and high-k gate dielectric leads to a high on-current, I(ON), and reduced subthreshold slope. The proposed structure increases I(ON) by a factor of 3.8 and reduces the subthreshold slope by a factor of 2 compared to other structures described in literature.
引用
收藏
页数:3
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