Photocurrent enhancement of graphene phototransistors using p-n junction formed by conventional photolithography process

被引：34
|
作者：
Shimatani, Masaaki [1 ]
Ogawa, Shinpei [1 ]
Fujisawa, Daisuke [1 ]
Okuda, Satoshi [1 ,2 ]
Kanai, Yasushi [2 ]
Ono, Takao [2 ]
Matsumoto, Kazuhiko [2 ]
机构：
[1] Mitsubishi Electr Corp, Adv Technol R&D Ctr, Amagasaki, Hyogo 6618661, Japan
[2] Osaka Univ, Inst Sci & Ind Res, Ibaraki, Osaka 5670047, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2016年 / 55卷 / 11期
关键词：
PHOTODETECTORS; PHOTORESPONSE;
D O I：
10.7567/JJAP.55.110307
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A p-n junction was developed in a graphene transistor by a simple photolithography process used in typical semiconductor processes. The p- and n-type regions were formed by coating photoresist on part of the graphene channel and immersion of the uncovered graphene region in alkali developer, respectively. A 3-fold enhancement of the photocurrent was observed at the maximum field effect mobility. It is therefore important to maximize the field effect mobility by doping to maximize the photocurrent. The results obtained here are an important step toward the production of high-sensitivity graphene-based phototransistors compatible with conventional industrial procedures. (C) 2016 The Japan Society of Applied Physics
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页数：4
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