Temperature-dependent Schottky barrier parameters of Ni/Au on n-type (001) β-Ga2O3 Schottky barrier diode

被引:67
|
作者
Reddy, P. R. Sekhar [1 ]
Janardhanam, V. [1 ]
Shim, Kyu-Hwan [1 ,2 ]
Reddy, V. Rajagopal [3 ]
Lee, Sung-Nam [4 ]
Park, Se-Jeong [5 ]
Choi, Chel-Jong [1 ]
机构
[1] Chonbuk Natl Univ, SPRC, Sch Semicond & Chem Engn, Jeonju 54896, South Korea
[2] Sigetronics Inc, R&D Ctr, Jeollabuk D 55314, South Korea
[3] Sri Venkateswara Univ, Dept Phys, Tirupati 517502, Andhra Pradesh, India
[4] Korea Polytech Univ, Dept Nanoopt Engn, Shihung 15073, South Korea
[5] Korea ITS Co Ltd, Applicat Grp, Seoul 06373, South Korea
基金
新加坡国家研究基金会;
关键词
beta-Ga2O3; Schottky diodes; Barrier inhomogeneities; Schottky barrier parameters; Double Gaussian distribution; Interface state density; CURRENT-VOLTAGE CHARACTERISTICS; ELECTRICAL CHARACTERISTICS; TRANSPORT; CONTACTS; HEIGHT;
D O I
10.1016/j.vacuum.2019.109012
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
This study examined the temperature-dependent current-voltage (I-V) characteristics of the Ni/Au Schottky contact to beta-Ga2O3. The Au/Ni/beta-Ga2O3 Schottky diode showed a good rectifying behavior. The on-resistance and rectification ratio decreased with increasing temperature, which could be ascribed to the increase in the number of thermally activated electrons. The Au/Ni/beta-Ga2O3 Schottky diode exhibited the strong temperature-dependence of Schottky barrier parameters, indicating the presence of inhomogeneous Schottky barrier prevailing in the interface between Ni and beta-Ga2O3. The inhomogeneities were analyzed using thermionic emission with assuming a Gaussian distribution of barrier heights. The results revealed the existence of a double Gaussian distribution of barrier heights in the diode with a transition occurring at 225 K. The modified Richardson plot was evaluated using a Gaussian distribution approach and yielded a Richardson constant closely matching with the theoretical value of beta-Ga2O3. The density of interface states, extracted using I-V characteristics, increased with decreasing temperature, which could be associated with the thermally-driven restructuring and reordering of the Ni/beta-Ga2O3 interface state.
引用
收藏
页数:9
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