Analysis of plume deflection in the silicon laser ablation process

被引：6

作者：

Conde, J. C. ^{[1
]}

Gonzalez, P. ^{[1
]}

Lusquinos, F. ^{[1
]}

Chiussi, S. ^{[1
]}

Serra, J. ^{[1
]}

Leon, B. ^{[1
]}

机构：

[1] Univ Vigo, Dept Fis Aplicada, Vigo 36310, Spain

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2007年 / 88卷 / 04期

关键词：

D O I：

10.1007/s00339-007-4024-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Changes in target surface morphology and ablation plume direction have been experimentally observed during the initial stages of the silicon laser ablation process. A relationship between both phenomena can be observed upon analysing the temperature field induced by the laser beam in a rough surface material. Theoretical studies on the deflection of the ablation plume are presented. These analyses are based on the hypothesis that particles that reach evaporation temperature will exit normally to the target surface with a velocity that is proportional to the surface temperature and the amount of the ablated material. Numerical solutions and experimental results of laser ablation process of silicon targets are found to agree with theoretical studies.

引用

页码：667 / 671

页数：5

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