Latest technology roadmap sharpens industry's future course

In even-numbered years, such as 2004, the International Technology Roadmap for Semiconductors (ITRS) undergoes an update in preparation for a full revision the following year, as is expected in 2005. Solid State Technology worked with leaders in various technical working groups of the 2004 ITRS to highlight the most significant updates in the new edition of the industry's roadmap, as well as major challenges to be addressed in the 2005 revision. This report summarizes modifications and challenges identified in process integration, wafer cleaning, and interconnect.