Implementation and Characterization of a femto-Farad Capacitive Sensor for pico-Liter Liquid Monitoring

被引：6

作者：

Wei, J. ^{[1
]}

Yue, C. ^{[2
]}

Chen, Z. L. ^{[2
]}

Liu, Z. W. ^{[2
]}

Makinwa, K. A. A. ^{[1
]}

Sarro, P. M. ^{[1
]}

机构：

[1] Delft Univ Technol, Delft, Netherlands

[2] Tsinghua Univ, IMETU, Beijing, Peoples R China

来源：

PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE | 2009年 / 1卷 / 01期

关键词：

Capacitive sensing; charge amplifier; lock-in amplifier; MEWS; inkjet; VOLUME;

D O I：

10.1016/j.proche.2009.07.030

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

An if-level capacitive sensor, intended for pL liquid measurements, has been fabricated with MEMS technology and successfully characterized. The sensor measures liquid level variations in a microfluidic channel. The sensor's capacitance varies from 1.5 if (channel empty) to 12.8fF (channel filled with 63 pL of water). To reliably detect such small capacitance changes, a low noise measurement system, based on a lock-in amplifier, was implemented. The measured sensitivity of the system is 14.1 mV/fF, and the capacitance detection limit is 0.057 aF/Hz(1/2), which corresponds to a volumetric resolution of about 0.22 fL/Hz(1/2).

引用

页码：120 / +

页数：2

共 23 条

[21] A Liquid-Metal Wearable Sensor for Respiration Monitoring: Biomechanical Requirements, Modeling, Design, and Characterization
Lazzari, Fabio
Gaviati, Marco
Garavaglia, Lorenzo
Romano, Jacopo
Pittaccio, Simone
IEEE SENSORS JOURNAL, 2023, 23 (06) : 6243 - 6253
[22] Implementation and Characterization of Liquid-Level Sensor Based on a Long-Period Fiber Grating Mach-Zehnder Interferometer
Fu, Hongyan
Shu, Xuewen
Zhang, Aping
Liu, Weisheng
Zhang, Lin
He, Sailing
Bennion, Ian
IEEE SENSORS JOURNAL, 2011, 11 (11) : 2878 - 2882
[23] Test tube dedicated microwave liquid dielectric sensor for non-contact properties change monitoring and material characterization with tube exchange capability
Piekarz, Ilona
Sorocki, Jakub
Bozzi, Maurizio
MEASUREMENT, 2022, 198

← 1 2 3 →