Implementation and Characterization of a femto-Farad Capacitive Sensor for pico-Liter Liquid Monitoring

被引：6
|
作者：
Wei, J. [1 ]
Yue, C. [2 ]
Chen, Z. L. [2 ]
Liu, Z. W. [2 ]
Makinwa, K. A. A. [1 ]
Sarro, P. M. [1 ]
机构：
[1] Delft Univ Technol, Delft, Netherlands
[2] Tsinghua Univ, IMETU, Beijing, Peoples R China
来源：
PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE | 2009年 / 1卷 / 01期
关键词：
Capacitive sensing; charge amplifier; lock-in amplifier; MEWS; inkjet; VOLUME;
D O I：
10.1016/j.proche.2009.07.030
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
An if-level capacitive sensor, intended for pL liquid measurements, has been fabricated with MEMS technology and successfully characterized. The sensor measures liquid level variations in a microfluidic channel. The sensor's capacitance varies from 1.5 if (channel empty) to 12.8fF (channel filled with 63 pL of water). To reliably detect such small capacitance changes, a low noise measurement system, based on a lock-in amplifier, was implemented. The measured sensitivity of the system is 14.1 mV/fF, and the capacitance detection limit is 0.057 aF/Hz(1/2), which corresponds to a volumetric resolution of about 0.22 fL/Hz(1/2).
引用
收藏
页码：120 / +
页数：2
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