Enhanced light output of InGaN LEDs with a roughened p-GaN surface using different TMGa flow rates in p-AlGaN layer

被引:9
|
作者
Tsai, P. C. [1 ,2 ]
Chen, W. R. [3 ]
Su, Y. K. [1 ,2 ,4 ]
Huang, C. Y. [1 ,2 ]
机构
[1] Natl Cheng Kung Univ, Dept Elect Engn, Inst Microelect, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Tainan 70101, Taiwan
[3] Natl Formosa Univ, Dept Elect Engn, Yunlin 632, Taiwan
[4] Kun Shan Univ, Dept Elect Engn, Tainan 710, Taiwan
关键词
GaN; Light-emitting diodes (LEDs); Light extraction efficiency; Surface roughness; NITRIDE-BASED LEDS; EMITTING-DIODES; POWER;
D O I
10.1016/j.apsusc.2010.04.072
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We have demonstrated the enhancement of light output of InGaN-based blue light-emitting diodes (LEDs) using different trimethylgallium (TMGa) flow rates in the growth of p-AlGaN epilayer to facilitate a rougher p-GaN surface. It is found that higher output power can be achieved from the LEDs with rougher surface morphologies when the TMGa flow rate (R(TMGa)) is increased up to 60 sccm during p-Al(0.05)Ga(0.95)N epilayer growth. Such a rough surface obtained at higher R(TMGa) is attributed to the fact that the vertical growth rate is faster than the lateral growth rate, thus, leading to the facet of crystal growth focuses mainly in the vertical direction. The output power of devices biased at 20 mA is 15.4, 15.9, 17.5, and 18.9 mW for TMGa flow rates of 10, 20, 40, and 60 sccm, respectively. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码:6694 / 6698
页数:5
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