High anisotropy Y-Co films on thin Cu underlayer

被引:2
|
作者
Kubota, Yukiko [1 ]
Fu, Yang
Wu, Xiaowei
Ambrose, Thomas F.
机构
[1] Seagate Technol LLC, Seagate Res, Pittsburgh, PA 15222 USA
[2] Vanderbilt Univ, Dept Mat Sci & Engn, Nashville, TN 37235 USA
关键词
copper underlayer; perpendicular magnetic anisotropy; yttrium cobalt alloys;
D O I
10.1109/TMAG.2007.892863
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The role of Cu underlayer for preparing CaCu5 -type high magnetic anisotropy YCo5 phase was studied. We prepared the Cu/YCo structure with a DC magnetron sputtering deposition system under elevated substrate temperatures. We successfully produced magnetic films which contains a high-Ku Y(Co, Cu)(5) phase using a 7.5-nm-thick Cu underlayer, and under the growth temperature of 470 degrees C and above. The film has the perpendicular c-axis orientation with spread of 3 degrees. At 470 degrees C growth temperature, the film consists of a crystalline Cu-rich Y(Co, Cu)(5) phase and an amorphous Co-rich Y(Co, Cu)(5) phase. A rather thin Cu underlayer thickness of 7.5 run was sufficient for obtaining a good perpendicular c-axis orientation, and the high-Ku phase production.
引用
收藏
页码:2998 / 3000
页数:3
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