Towards large scale orientation mapping using the eCHORD method

被引：4

作者：

Lafond, C. ^{[1
]}

Douillard, T. ^{[1
]}

Cazottes, S. ^{[1
]}

De Graef, M. ^{[2
]}

Steyer, P. ^{[1
]}

Langlois, C. ^{[1
]}

机构：

[1] Univ Lyon, INSA Lyon, CNRS, MATEIS,UMR5510, 7 Ave Jean Capelle, F-69621 Villeurbanne, France

[2] Carnegie Mellon Univ, Dept Mat Sci & Engn, Pittsburgh, PA 15213 USA

来源：

ULTRAMICROSCOPY | 2020年 / 208卷

关键词：

Orientation mapping; SEM; Electron channeling; EBSD; Large area mapping; SEM;

D O I：

10.1016/j.ultramic.2019.112854

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

eCHORD is an alternative method for orientation mapping in Scanning Electron Microscopy that involves channeling contrast observed in BSE images. The sample tilt being small (10 degrees), eCHORD could be a promising method for large scale maps as it limits the image deformation sometimes observed with EBSD maps. However, when the magnification is low, the scan deflection of the beam becomes important, which may modify the channeling conditions of analyzed grains, leading to orientation errors. A correction method for the resulting orientations is proposed and a resulting map on a Si single crystal is presented with an experimental misorientation of 0.12 degrees across a field of view of 2.3 x 1.7 mm(2).

引用

页数：9

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