Asymmetric dual-level grating coupler for coupling light to ultra-thin Si/Si3N4 composite photonics

被引:0
|
作者
The Anh Nguyen [1 ]
Lee, Ming-Chang M.
机构
[1] Natl Tsing Hua Univ, Dept Elect Engn, 101,Sect 2,Kuang Fu Rd, Hsinchu 30013, Taiwan
来源
2020 OPTO-ELECTRONICS AND COMMUNICATIONS CONFERENCE (OECC 2020) | 2020年
关键词
WAVE-GUIDE; SILICON;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present an asymmetric dual-level grating coupler fabricated on an ultra-thin Si/Si3N4 composite photonics platform to achieve a high coupling efficiency for light coupled from a single-mode fiber to the waveguide and vice versa.
引用
收藏
页数:3
相关论文
共 50 条
  • [21] Si3N4-ZrO2 composite with precipitated α-Si3N4 whisker
    Mori, Toshiyuki
    Arakawa, Toshihiko
    Higuchi, Shinji
    Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan, 1988, 96 (07): : 744 - 748
  • [22] DUAL SI3N4 CHARGE TRAPPING LAYER (SONNOS) NONVOLATILE MEMORY WITH ULTRA-THIN BODY TRENCH POLY-SI JUNCTIONLESS FET FOR 3D NAND APPLICATIONS
    Wu, Yung-Chun
    Lin, Yu-Ru
    Chiang, Yi-Wei
    Wang, Wei-Cheng
    PROCEEDINGS OF THE ASME CONFERENCE ON INFORMATION STORAGE AND PROCESSING SYSTEMS, 2016, 2016,
  • [23] Si3N4/SiO2/Si waveguide grating for fluorescent biosensors
    Voirin, G
    Gehriger, D
    Parriaux, OM
    Usievich, B
    INTEGRATED OPTICS DEVICES III, 1999, 3620 : 109 - 116
  • [24] Annealing- free Si3N4 frequency combs for monolithic integration with Si photonics
    El Dirani, Houssein
    Kamel, Ayman
    Casale, Marco
    Kerdiles, Sebastien
    Monat, Christelle
    Letartre, Xavier
    Pu, Minhao
    Oxenlowe, Leif Katsuo
    Yvind, Kresten
    Sciancalepore, Corrado
    APPLIED PHYSICS LETTERS, 2018, 113 (08)
  • [25] Examination of novel electrosprayed biogenic hydroxyapatite coatings on Si3N4 and Si3N4/MWCNT ceramic composite
    Zagyva, Tamas
    Balazsi, Katalin
    Balazsi, Csaba
    PROCESSING AND APPLICATION OF CERAMICS, 2019, 13 (02) : 132 - 138
  • [26] Turning of CFRC composites using Si3N4 and thin CVD diamond coated Si3N4 tools
    Belmonte, M
    Oliveira, FJ
    Lanna, MA
    Silva, CM
    Corat, EJ
    Silva, RF
    ADVANCED MATERIALS FORUM II, 2004, 455-456 : 609 - 613
  • [27] FRACTURE-TOUGHNESS OF SI3N4 AND ITS SI3N4 WHISKER COMPOSITE WITHOUT SINTERING AIDS
    TANAKA, I
    PEZZOTTI, G
    MIYAMOTO, Y
    OKAMOTO, T
    JOURNAL OF MATERIALS SCIENCE, 1991, 26 (01) : 208 - 210
  • [28] CHARACTERISTICS OF COMPOSITE LAYERS Ni/Si3N4
    Kowalewska, Magdalena
    Trzaska, Maria
    COMPOSITES THEORY AND PRACTICE, 2005, 5 (04): : 37 - 40
  • [29] Interfaces in Si3N4/BN(f) composite
    Xu, FF
    Song, CY
    Wen, SL
    Ma, LT
    JOURNAL OF INORGANIC MATERIALS, 1998, 13 (01) : 109 - 112
  • [30] Structure and properties of thin coatings Si3N4 and Ni3Si
    Ignatenko, PI
    Goncharov, AA
    Primin, SS
    METALLOFIZIKA I NOVEISHIE TEKHNOLOGII, 1998, 20 (06): : 70 - 73