Size-dependent static bending of anisotropic rectangular nanoplates with cubic crystal structures

Here, size-dependent static bending of anisotropic rectangular nanoplates is investigated based on surface elasticity theory. The governing equations of the nanoplate are derived considering the most common boundary conditions in MEMS/NEMS. To solve the derived equations, the generalized differential quadrature method is used and the results are verified with experimental ones due to similarities of the results for cantilever nanoplates and nanobeams. Also, several simulations are performed considering fully clamped, two edges clamped, and cantilever boundary conditions for the mostly used anisotropic materials with face-centred cubic and body-centred cubic crystal structures. The obtained results indicate that the static bending behaviour of the nanoplate extremely depends on material anisotropy and orientation, surface effects, and boundary conditions. Moreover, the results are comprehensively discussed for changing the geometrical aspect ratio of the nanoplate.