Characteristics of Al/Ge Schottky and ohmic contacts at low temperatures

被引:7
|
作者
Pitale, Shreyas [1 ]
Ghosh, Manoranjan [1 ]
Singh, S. G. [1 ]
Manasawala, Husain [1 ]
Patra, G. D. [1 ]
Sen, Shashwati [1 ,2 ]
机构
[1] Bhabha Atom Res Ctr, Tech Phys Div, Crystal Technol Sect, Mumbai 400085, Maharashtra, India
[2] Homi Bhabha Natl Inst, Mumbai 400094, Maharashtra, India
关键词
Al; ge Schottky contact; Barrier potential; Richardson plot; Charge neutrality level; Activation energy; Thermal regrowth; Rectification ratio; BARRIER HEIGHT; N-GE; EPITAXIAL-GROWTH; DIODES; CMOS;
D O I
10.1016/j.mssp.2021.105820
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Schottky barrier contact has been fabricated by thermal deposition of Al on (100) p-Ge (impurity concentration similar to 1010/cm3 at 80K) that shows n-type conductivity above 180K due to thermally generated carriers. Both p and n-type Ge exhibits ideal Schottky behavior with low reverse current and near unity ideality factors obtained from the linear form of temperature dependent current-voltage (I-V) characteristics. The diode current at various temperatures change its direction at non-zero applied bias that reflects a shift in position of charge neutrality level (CNL) from the Fermi level of Ge. With the rise in temperature, Schottky barrier height (SBH) steadily increases for p-Ge that can be understood on the basis of observed variation in CNL. Values of SBH determined from the zero bias Richardson plot agrees well with that estimated from the Schottky-Mott rule for strongly pinned interface. Activation energies are determined from the Richardson plot at various forward voltages and found to decrease with applied bias for n-Ge but reduces to zero for p-Ge that shows work function similar to Al. Annealing of Al/Ge induces regrowth of p-type Al doped Ge layer that exhibits gradual reduction of Al concentration towards p-Ge crystal. Al doped Ge (p+)/Ge (p) junction thus fabricated shows linear I-V characteristics in the extrinsic region (below 180K). In the intrinsic region (above 180K), rectification is observed in the I-V curve due to temperature dependent change in conductivity of both Al doped Ge layer and Ge crystal.
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页数:10
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