[1] Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
[2] Tsinghua Univ, Beijing Natl Res Ctr Informat Sci & Technol BNRis, Inst Microelect, Beijing 100084, Peoples R China
[3] Beijing Inst Technol, Sch Informat & Elect, Beijing 100081, Peoples R China