Measurement Error of Interferometers with Diffraction Reference Wave

被引：3

作者：

Akhsakhalyan, A. A. ^{[1
]}

Gavrilin, D. A. ^{[1
]}

Malyshev, I., V ^{[1
]}

Salashchenko, N. N. ^{[1
]}

Toropov, M. N. ^{[1
]}

Ulasevich, B. A. ^{[1
]}

Tsybin, N. N. ^{[1
]}

Chkhalo, N., I ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Phys Microstruct, Nizhnii Novgorod 603950, Russia

来源：

TECHNICAL PHYSICS | 2019年 / 64卷 / 11期

关键词：

ROUGHNESS;

D O I：

10.1134/S1063784219110021

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

An experimental setup and results on aberration of sources of a reference spherical wave (SRSW) based on a single-mode optical fiber with a subwavelength output aperture obtained with the aid of an optical part of recording system (OPRS) are presented. SRSW and OPRS are developed for referenceless interferometer with diffraction reference wave. Methods for minimization of the measurement error are proposed. The SRSW and OPRS provide subnanometer measurement accuracy for optics. An increase in the measurement accuracy of the interferometer to a picometer level is discussed.

引用

页码：1698 / 1703

页数：6

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