Single-photon detector enables backside chip inspection

被引：0
|
作者：
Mendonsa, RA
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来源：
PHOTONICS SPECTRA | 1998年 / 32卷 / 04期
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中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
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页码：29 / 29
页数：1
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