Mutual-Coupling in High-Q Silicon Dual-Concentric Micro-Ring/Racetrack Resonator

被引:0
|
作者
Xu, Yan [1 ]
Liu, Tingyu [1 ]
Liu, Songyue [1 ]
Sun, Xiaoqiang [1 ]
Zhang, Daming [1 ]
机构
[1] Jilin Univ, Coll Elect Sci & Amp Engn, State Key Lab Integrated Optoelect, Changchun 130012, Peoples R China
来源
IEEE PHOTONICS JOURNAL | 2022年 / 14卷 / 04期
关键词
Couplings; Silicon; Optical waveguides; Resonant frequency; Optical ring resonators; Q-factor; Semiconductor device modeling; Micro-ring resonator; racetrack resonator; silicon photonics; CMOS; RING-RESONATOR; FILTER; SWITCH; LIGHT; BACKSCATTERING; DESIGN;
D O I
10.1109/JPHOT.2022.3186914
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Micro-ring resonator (MRR) is a key element in integrated optics. The mutual-coupling in dual-concentric MRR has great influence on the resonance output. In this work, high-Q silicon dual-concentric MRR and racetrack resonator have been investigated by the coupled mode theory. The theoretical model is built to explain and alleviate the phenomenon of resonance splitting. CMOS fabrication is adopted for the preparation of dual-concentric MRR and racetrack resonators. The highest Q-factors of dual-concentric MRR and racetrack resonator are measured to be similar to 9.00 x 10(4) at 1530.783 nm and similar to 7.32 x 10(4) at 1536.596 nm, respectively. The notch depth improvement over 20 dB has been demonstrated on the 5-mu m-radius double-ring structure. The experimental results prove that the asymmetry of resonance splitting can be tuned by adjusting the distance between the inner-ring and outer-ring, as well as the waveguide width. The proposed work has potentials in the design and optimization of dual-concentric ring resonators.
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页数:7
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