Growth of metastable alloy InAsBi by low-pressure MOVPE

被引:48
|
作者
Okamoto, H [1 ]
Oe, K [1 ]
机构
[1] NTT Corp, Optoelect Labs, Atsugi, Kanagawa 24301, Japan
关键词
InAsBi; MOVPE; metastable alloy; impurities; droplet; whisker; X-ray diffraction; SIMS; RES; SEM-EDX;
D O I
10.1143/JJAP.37.1608
中图分类号
O59 [应用物理学];
学科分类号
摘要
Low-pressure metalorganic-vapor-phase epitaxy (MOVPE) growth properties of InAsBi, such as the relationship between the InBi composition and growth conditions, the growth conditions by which crystal with mirror-like surface can be obtained, and impurities in the InAsBi layer, are investigated. A mirror-like surface InAsBi layer with very high InBi content (3-4%) compared to the InBi solubility limit of 0.025% is obtained. On the other hand, surface morphologies with droplets, and with whiskers are observed when the growth conditions are not appropriate. In addition, the percentage of Bi substitutionally incorporated into InAs-zinc-blende lattice is evaluated for the first time. As for the impurities in the crystal, both the carbon and silicon in the InAsBi layer are below the detection limits, in spite of the low growth temperature of 365 degrees C, Possible mechanisms dominating the alloy composition and the droplet formation are also discussed.
引用
收藏
页码:1608 / 1613
页数:6
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