Fabrication of hexagonal-prism microstructure using monolithic etching process

In this paper, we propose a novel method to fabricate three-dimensional hexagonal-like fillister structures on < 110 > silicon wafer by precise bulk etching in Micro Electro Mechanical Systems (MEMS). Photo mask is designed as a 50x50 array of equilateral parallelograms having side length of 80 mu m. The 40wt% KOH solution is used as the etchant. The created structure is used as the mold to cast the PDMS three-dimensional hexagonal-like structures. The created microstructure is believed to have great potential in developing high performance devices in optical, heat-exchanging, and biochemical applications.