Thin film deposition and dry etching on large substrates for TFT-LCD Display manufacturing

被引：0
|
作者：
Aing, P
Driessen, J
Schmitt, J
Perrin, J
机构：
[1] Balzers Proc Syst, Palaiseau, France
[2] Balzers Proc Syst, Trubbach, Switzerland
来源：
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS | 2000年 / 55卷 / 295期
关键词：
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：21 / 29
页数：9
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