Fabrication of patterned diamond field emitter tips using silicon oxide barrier

被引：0
|
作者：
Cho, H
Chung, B
Ko, T
Jeon, D
Lee, MS
Baik, YJ
机构：
来源：
IVMC '96 - 9TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE, TECHNICAL DIGEST | 1996年
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D O I：
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中图分类号：
T [工业技术];
学科分类号：
08 ;
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页码：313 / 315
页数：3
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