Preparation and thermoelectric characteristics of ITO/Pt thin film thermocouples on Ni-based superalloy substrate

被引：16
|
作者：
Zhao, Xiaohui [1 ]
Li, Haitao [1 ]
Chen, Yinzhi [1 ]
Jiang, Hongchuan [1 ]
机构：
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Film & Integrated Device, Chengdu, Sichuan, Peoples R China
来源：
VACUUM | 2017年 / 140卷
基金：
中国国家自然科学基金;
关键词：
ITO; Thin film thermocouple; Magnetron sputtering; Ni-based superalloy; GAS-TURBINE ENGINES; TEMPERATURE-MEASUREMENT; MICROSTRUCTURE; FABRICATION; STABILITY;
D O I：
10.1016/j.vacuum.2016.11.034
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Thin film thermocouples could provide precise temperature measurement of the hot components of gas turbine engines with fast response in harsh environments. ITO thin films were prepared by radio frequency magnetron sputtering in pure argon atmosphere and annealed in air at 1000 degrees C. The variation of the microstructure and electrical properties of indium tin oxide thin films with annealing was disclosed. ITO/Pt thin film thermocouple was fabricated on Ni-based superalloy substrate by sputtering with stencil mask. And the thermoelectric performance and stability of the thin film thermocouples were characterized with temperature up to 1100 degrees C. (C) 2016 Elsevier Ltd. All rights reserved.
引用
收藏
页码：116 / 120
页数：5
相关论文
共 50 条
  • [31] INFLUENCE OF Pt ON THE CREEP RUPTURE PROPERTIES OF Ni-BASED SINGLE CRYSTAL SUPERALLOY
    Lin Huiwen
    Liu Jide
    Zhou Yizhou
    Jin Tao
    Sun Xiaofeng
    ACTA METALLURGICA SINICA, 2015, 51 (01) : 77 - 84
  • [32] Characteristics of double planar thin film inductor with Ni-based magnetic film for DC/DC integration
    Chen, Mingming
    Ding, Guifu
    Zhao, Mengyuan
    PROCEEDINGS OF THE 2016 INTERNATIONAL SYMPOSIUM ON ADVANCES IN ELECTRICAL, ELECTRONICS AND COMPUTER ENGINEERING (ISAEECE), 2016, 69 : 103 - 106
  • [33] Laser processed intermetallic matrix composite coatings on Ni-based superalloy substrate
    Fan, Ding
    Sun, Yao-Ning
    Zhang, Jian-Bin
    Sun, Ming
    PROGRESSES IN FRACTURE AND STRENGTH OF MATERIALS AND STRUCTURES, 1-4, 2007, 353-358 : 1338 - 1341
  • [34] Hot corrosion and interdiffusion behavior of refurbished (Ni,Pt)Al coating on Ni-based superalloy
    Zhang, C. Y.
    Li, Y. Y.
    Ji, H. Z.
    Zhang, C.
    Niu, X. Y.
    Li, S.
    Bao, Z. B.
    Zhu, S. L.
    Wang, F. H.
    CORROSION SCIENCE, 2025, 247
  • [35] Preparation and dielectric properties of LiTaO3 thin film on the ITO substrate
    Zhang De-Yin
    Huang Da-Gui
    Li Jin-Hua
    Li Kun
    Dan Di-Di
    Dong Zheng
    JOURNAL OF INFRARED AND MILLIMETER WAVES, 2007, 26 (03) : 170 - 173
  • [36] Study of the interdiffusion behavior between NiCrAlYSi coating and Ni-based superalloy substrate
    Xu, Zhen-Hua
    Mu, Ren-De
    Cao, Xue-Qiang
    He, Li-Min
    Cailiao Gongcheng/Journal of Materials Engineering, 2009, (02): : 67 - 73
  • [37] Diffusion barrier behaviors of (Ru,Ni)Al/NiAl coatings on Ni-based superalloy substrate
    Wang, Ying
    Guo, Hong-bo
    Peng, Hui
    Peng, Li-quan
    Gong, Sheng-kai
    INTERMETALLICS, 2011, 19 (02) : 191 - 195
  • [38] Analysis of surface layer characteristics after machining of a Ni-based superalloy
    Azim, Sabana
    Thakur, Aruna
    Gangopadhyay, Soumya
    SADHANA-ACADEMY PROCEEDINGS IN ENGINEERING SCIENCES, 2022, 47 (04):
  • [39] Analysis of surface layer characteristics after machining of a Ni-based superalloy
    SABANA AZIM
    ARUNA THAKUR
    SOUMYA GANGOPADHYAY
    Sādhanā, 47
  • [40] A study of the LCF characteristics of the Ni-based superalloy IN738LC
    Dongkeun Lee
    To Kang
    Jae-Mean Koo
    Chang-Sung Seok
    Sung-Jin Song
    International Journal of Precision Engineering and Manufacturing, 2015, 16 : 775 - 780
12345