AMBIENT PRESSURE DRIFT REJECTION OF MODE-LOCALIZED RESONANT SENSORS

被引：0
|
作者：
Zhang, Hemin [1 ]
Zhong, Jiming [1 ]
Yuan, Weizheng [1 ]
Yang, Jing [1 ]
Chang, Honglong [1 ]
机构：
[1] Northwestern Polytech Univ, MOE Key Lab Micro & Nano Syst Aerosp, Xian, Peoples R China
来源：
30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017) | 2017年
基金：
中国国家自然科学基金;
关键词：
WEAKLY COUPLED RESONATORS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper experimentally demonstrates the ambient pressure drift rejection capability in the full measurement range of the mode-localized sensors. Based on a modelocalized resonant stiffness sensor, the experimental results show that the maximum measurement error of the amplitude ratio readout is similar to 2.74% whereas that of the frequency readout is similar to 21.63% with a pressure range of 2.6, 20] Pa. And the amplitude ratio based sensitivity is averagely similar to 1970.3 times higher than the frequency based sensitivity. It can be concluded that the mode-localized sensors can not only amplify the sensitivity but also reject the ambient pressure drift.
引用
收藏
页码：1095 / 1098
页数：4
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