A Closed-Loop Readout Configuration for Mode-Localized Resonant MEMS Sensors

被引：34
|
作者：
Zhao, Chun [1 ]
Pandit, Milind [1 ]
Sun, Boqian [1 ]
Sobreviela, Guillermo [1 ]
Zou, Xudong [2 ]
Seshia, Ashwin [1 ]
机构：
[1] Univ Cambridge, Cambridge CB3 0FF, England
[2] Chinese Acad Sci, Inst Elect, Beijing 100190, Peoples R China
来源：
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2017年 / 26卷 / 03期
基金：
英国自然环境研究理事会;
关键词：
Mode localized resonant sensor; self-sustained oscillator;
D O I：
10.1109/JMEMS.2017.2690942
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This letter presents the first experimental results on the closed-loop characterization of a mode-localized microelectromechanical resonator system. Comparisons between the closed-loop oscillator approach and the open-loop frequency sweep approach show good agreement of output metrics including the amplitude ratios and mode frequencies. This new approach enables real-time measurements using emerging mode-localized resonant sensors and represents an important step toward realizing sensors based on this measurement principle.
引用
收藏
页码：501 / 503
页数：3
相关论文
共 50 条
  • [1] Closed-Loop Characterization of Noise and Stability in a Mode-Localized Resonant MEMS Sensor
    Pandit, Milind
    Zhao, Chun
    Sobreviela, Guillermo
    Mustafazade, Arif
    Du, Sijun
    Zou, Xudong
    Seshia, Ashwin A.
    [J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2019, 66 (01) : 170 - 180
  • [2] Closed-loop tracking of amplitude and frequency in a mode-localized resonant MEMS sensor
    Pandit, Milind
    Zhao, Chun
    Sobreviela, Guillermo
    Mustafazade, Aref
    Seshia, Ashwin A.
    [J]. 2017 JOINT CONFERENCE OF THE EUROPEAN FREQUENCY AND TIME FORUM AND IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (EFTF/IFC), 2017, : 510 - 513
  • [3] A Closed-Loop Mode-Localized Accelerometer
    Yang, Jing
    Zhong, Jiming
    Chang, Honglong
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2018, 27 (02) : 210 - 217
  • [4] Impact of output metric on the resolution of mode-localized MEMS resonant sensors
    Juillard, J.
    Prache, P.
    Ferreira, P. Maris
    Barniol, N.
    [J]. 2017 JOINT CONFERENCE OF THE EUROPEAN FREQUENCY AND TIME FORUM AND IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (EFTF/IFC), 2017, : 506 - 509
  • [5] A decouple-decomposition noise analysis model for closed-loop mode-localized tilt sensors
    Kunfeng Wang
    XingYin Xiong
    Zheng Wang
    Liangbo Ma
    BoWen Wang
    WuHao Yang
    Xiaorui Bie
    ZhiTian Li
    XuDong Zou
    [J]. Microsystems & Nanoengineering, 9
  • [6] A decouple-decomposition noise analysis model for closed-loop mode-localized tilt sensors
    Wang, Kunfeng
    Xiong, Xingyin
    Wang, Zheng
    Ma, Liangbo
    Wang, Bowen
    Yang, Wuhao
    Bie, Xiaorui
    Li, Zhitian
    Zou, Xudong
    [J]. MICROSYSTEMS & NANOENGINEERING, 2023, 9 (01)
  • [7] State-of-the-Art in Mode-Localized MEMS Coupled Resonant Sensors: A Comprehensive Review
    Pachkawade, Vinayak
    [J]. IEEE SENSORS JOURNAL, 2021, 21 (07) : 8751 - 8779
  • [8] THE TEMPERATURE DRIFT SUPPRESSION OF MODE-LOCALIZED RESONANT SENSORS
    Zhong, Jiming
    Yang, Jing
    Chang, Honglong
    [J]. 2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2018, : 467 - 470
  • [9] AMBIENT PRESSURE DRIFT REJECTION OF MODE-LOCALIZED RESONANT SENSORS
    Zhang, Hemin
    Zhong, Jiming
    Yuan, Weizheng
    Yang, Jing
    Chang, Honglong
    [J]. 30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 2017, : 1095 - 1098
  • [10] A Closed-Loop System for Resonant MEMS Sensors Subject to Blue-Sideband Excitation
    Xu, Lei
    Xi, Jingqian
    Gao, Lu
    Li, Fangzheng
    Pi, Jianyuan
    Li, Chengxin
    Wang, Kunfeng
    Xiong, Xingyin
    Wang, Yuan
    Liu, Huafeng
    Zou, Xudong
    Zhao, Chun
    [J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2022, 31 (04) : 690 - 699
12345