Imaging Interferometric Microscopy - Resolution to the Linear Systems Limits

被引：0
|
作者：
Brueck, S. R. J. [1 ]
机构：
[1] Univ New Mexico, Ctr High Technol Mat, Albuquerque, NM 87131 USA
来源：
2009 IEEE LEOS ANNUAL MEETING CONFERENCE PROCEEDINGS, VOLS 1AND 2 | 2009年
关键词：
D O I：
10.1109/LEOS.2009.5343293
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Imaging interferometric microscopy resolution to lambda/2(n(sub)+1) (n(sub) = substrate refractive index) is demonstrated using evanescent-wave illumination. Resolution to 150 nm (lambda/4.2) is achieved using a 633 nm source and a 0.4 NA lens.
引用
收藏
页码：238 / 239
页数：2
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