Femtosecond Laser Micromachining of Microfluidic Fiber Sensors

被引:0
|
作者
Liao, Changrui [1 ]
Xu, Lei [2 ]
Li, Zhengyong [1 ]
Zhu, Feng [1 ]
Yang, Tianhang [1 ]
Guo, Kuikui [1 ]
Wang, Yiping [1 ]
机构
[1] Shenzhen Univ, Coll Optoelect Engn, Key Lab Optoelect Devices & Syst, Minist Educ & Guangdong Prov, Shenzhen 518060, Peoples R China
[2] Shenzhen Polytech, Sch Elect & Commun Engn, Shenzhen 518055, Peoples R China
基金
中国国家自然科学基金;
关键词
Femtosecond laser micromachining; microfluidic fiber sensors; FABRY-PEROT-INTERFEROMETER; REFRACTIVE-INDEX;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Migration of lab-on-chip configurations into the optical fiber platform opens the revolutionary prospect of labin-fiber systems on the basis of an efficient optical transport highway for multifunctional sensing. In this paper, three-dimensional microfluidic channels patterning inside the fiber by femtosecond laser ablation, femtosecond laser assisted splicing and selective chemical etching will be introduced in terms of machining mechanism and accuracy. In these approaches, we have successfully achieved phase-shifted FBG sensor based on in-grating bubble and several in-fiber cavity based interferometric sensors and also preliminarily explore their applications in biochemical analysis.
引用
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页数:3
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