Operational characteristics of electrostatically driven torsional resonator with two degrees of freedom

被引：4

作者：

Usuda, T ^{[1
]}

机构：

[1] Natl Res Lab Metrol, Ibaraki, Osaka 305, Japan

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1998年 / 64卷 / 03期

关键词：

resonator with two degrees of freedom; electrostatic force; microactuators; low voltage drive; frequency response; antiresonance;

D O I：

10.1016/S0924-4247(97)01607-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Actuators based on the electrostatic principle are some of the most important devices in microsystems. However it is difficult to combine low voltage drive with large amplitude. In this paper, the operational characteristics of an electrostatically driven torsional resonator with two degrees of freedom (TDF) are theoretically investigated. The advantage of the resonator with TDF for obtaining low voltage drive and large amplitude is indicated. (C) 1998 Elsevier Science S.A.

引用

页码：255 / 257

页数：3

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