Simulation of low-energy ion scattering

被引:7
|
作者
Langelaar, MH [1 ]
Breeman, M [1 ]
Mijiritskii, AV [1 ]
Boerma, DO [1 ]
机构
[1] Univ Groningen, Ctr Mat Sci, NL-9747 AG Groningen, Netherlands
关键词
simulation; low-energy ion scattering; surface structure;
D O I
10.1016/S0168-583X(97)00503-X
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A new simulation program 'MATCH' has been developed for a detailed analysis of low-energy ion scattering (LEIS) and recoiling data. Instead of performing the full calculation of the three-dimensional trajectories through the sample from the ion source towards the detector, incoming trajectories as well as reversed-time outgoing trajectories are calculated, separately. Finally, these trajectories are matched to obtain the yield. The program has been tested for spectra and azimuthal scans of scattering and recoiling events of various sample species in different scattering geometries. (C) 1997 Elsevier Science B.V.
引用
收藏
页码:578 / 584
页数:7
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