High-Q whispering-gallery modes in GaAs/AlOx microdisks -: art. no. 021103

被引：18
|
作者：
Peter, E [1 ]
Sagnes, I [1 ]
Guirleo, G [1 ]
Varoutsis, S [1 ]
Bloch, J [1 ]
Lemaître, A [1 ]
Senellart, P [1 ]
机构：
[1] CNRS, Lab Photon & Nanostruct, F-91460 Marcoussis, France
来源：
APPLIED PHYSICS LETTERS | 2005年 / 86卷 / 02期
关键词：
D O I：
10.1063/1.1844033
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We report on the fabrication of microdisks on an AlOx pedestal. We develop a process using electron beam lithography, a chemical etching, and selective oxidation. InAs self-assembled quantum dots are used as a broad band source to probe the optical modes of the microdisks. With this process, we observe whispering-gallery modes, with quality factors as large as 12 500 for 2-mum-diam microdisks. (C) 2005 American Institute of Physics.
引用
收藏
页码：021103 / 1
页数：3
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