High-Q whispering-gallery modes in GaAs/AlOx microdisks -: art. no. 021103

被引：18

作者：

Peter, E ^{[1
]}

Sagnes, I ^{[1
]}

Guirleo, G ^{[1
]}

Varoutsis, S ^{[1
]}

Bloch, J ^{[1
]}

Lemaître, A ^{[1
]}

Senellart, P ^{[1
]}

机构：

[1] CNRS, Lab Photon & Nanostruct, F-91460 Marcoussis, France

来源：

APPLIED PHYSICS LETTERS | 2005年 / 86卷 / 02期

关键词：

D O I：

10.1063/1.1844033

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report on the fabrication of microdisks on an AlOx pedestal. We develop a process using electron beam lithography, a chemical etching, and selective oxidation. InAs self-assembled quantum dots are used as a broad band source to probe the optical modes of the microdisks. With this process, we observe whispering-gallery modes, with quality factors as large as 12 500 for 2-mum-diam microdisks. (C) 2005 American Institute of Physics.

引用

页码：021103 / 1

页数：3

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