Silicon-based resonant cavity detectors for long-wave infrared imaging

被引：0
|
作者：
Robbins, DJ [1 ]
Carline, RT [1 ]
Stanaway, MB [1 ]
Leong, WY [1 ]
机构：
[1] DEF RES AGCY,MALVERN WR14 3PS,WORCS,ENGLAND
来源：
PHOTODETECTORS: MATERIALS AND DEVICES | 1996年 / 2685卷
关键词：
SiGe/Si; quantum well infrared photodetector; vertical resonant cavity; silicon-on-insulator;
D O I：
10.1117/12.237705
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：188 / 194
页数：7
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