Electrical Characterization of Metal-Ferroelectric-Insulator-Semiconductor having Double Layered Insulator for Memory Applications

被引:0
|
作者
Ismail, L. N. [1 ]
Wahid, M. H. [3 ]
Habibah, Z. [1 ]
Herman, S. H. [1 ]
Rozana, M. D. [3 ]
Rusop, M. [2 ]
机构
[1] Univ Teknol MARA UiTM, Fac Elect Engn, NANOelecT Ctr NET, Shah Alam 40450, Selangor, Malaysia
[2] Univ Teknol MARA, NANOSciTech Ctr NST, Inst Appl Sci, Shah Alam 40450, Malaysia
[3] Univ Teknol MARA, Fac Sci Appl, Shah Alam 40450, Malaysia
关键词
THIN-FILMS;
D O I
10.1088/1757-899X/64/1/012053
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Metal-ferroelectric-insulator-semiconductor (MFIS) devices were successfully fabricated using poly(vinylidene fluoride-trifluoroethylene) (PVDF-TrFE) and poly (methyl methacrylate): titanium dioxide (PMMA:TiO2) nanocomposite as ferroelectric and insulator films, respectively on n-type silicon (n-Si) substrate. Both ferroelectric and insulator films were prepared by sol-gel spin coating method. The electrical behaviour of metal-ferroelectric-metal (MFM) structure with PVDF-TrFE film and metal-insulator-metal (MIM) structure PMMA: TiO2 film exhibited different current characteristics. The capacitance of the MFIS devices was found to be 0.42 and 0.29 nF at frequency of 1kHz and 1 MHz respectively. Meanwhile, the dielectric loss values are constant (similar to 60 x 10(-3)) in the frequency range from 100 Hz to 100 kHz. I-V results for MFIS are much higher than MIM and MFM is due to there is a trapped holes/electron located at the semiconductor-insulator interface which contributes to high leakage current in the MFIS device. We conclude, although interposing the PMMA:TiO2 nanocomposite insulator layer between the semiconductor and Al electrodes degrades the MFIS performance, nevertheless, they remain sufficiently good for use in organic electronic devices.
引用
收藏
页数:4
相关论文
共 50 条
  • [1] Ionizing radiation effect on metal-ferroelectric-insulator-semiconductor memory capacitors
    Yan, S. A.
    Li, G.
    Zhao, W.
    Guo, H. X.
    Xiong, Y.
    Tang, M. H.
    Li, Z.
    Xiao, Y. G.
    Zhang, W. L.
    Lei, Z. F.
    Zhou, Y. C.
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2015, 30 (08)
  • [2] Improvement of memory retention in metal-ferroelectric-insulator-semiconductor (MFIS) structures
    Okuyama, M
    Noda, M
    FERROELECTRIC THIN FILMS: BASIC PROPERTIES AND DEVICE PHYSICS FOR MEMORY APPLICATIONS, 2005, 98 : 219 - 239
  • [3] A Comprehensive Simulation Study on Capacitive Memory with Metal-Ferroelectric-Insulator-Semiconductor Structure
    Zhang, Hongrui
    Jin, Chengji
    Jia, Xiaole
    Chen, Jiajia
    Liu, Huan
    Liu, Yan
    Yu, Xiao
    Han, Genquan
    2023 7TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE, EDTM, 2023,
  • [4] Metal-ferroelectric-insulator-semiconductor memory FET with long retention and high endurance
    Sakai, S
    Ilangovan, R
    IEEE ELECTRON DEVICE LETTERS, 2004, 25 (06) : 369 - 371
  • [5] Ferroelectricity of pure HfOx in metal-ferroelectric-insulator-semiconductor stacks and its memory application
    Min, Kyung Kyu
    Yu, Junsu
    Kim, Yeonwoo
    Kim, Chae Soo
    Jang, Taejin
    Hwang, Sungmin
    Kim, Hyungjin
    Lee, Jong-Ho
    Kwon, Daewoong
    Park, Byung-Gook
    APPLIED SURFACE SCIENCE, 2022, 573
  • [6] Factors for the polarization lifetime in metal-ferroelectric-insulator-semiconductor capacitors
    Xiao, Y. G.
    Xiong, Y.
    Tang, M. H.
    Li, J. C.
    Gu, X. C.
    Cheng, C. P.
    Jiang, B.
    Tang, Z. H.
    Lv, X. S.
    Cai, H. Q.
    He, J.
    SOLID-STATE ELECTRONICS, 2012, 73 : 84 - 88
  • [7] A model for the electrical characteristics of metal-ferroelectric-insulator-semiconductor field-effect transistor
    Sun, Jing
    Zheng, Xue Jun
    Li, Wen
    CURRENT APPLIED PHYSICS, 2012, 12 (03) : 760 - 764
  • [8] Modeling of temperature characteristics for metal-ferroelectric-insulator-semiconductor devices
    Tang, J. X.
    Tang, M. H.
    Yang, F.
    Zhang, J. J.
    Zhou, Y. C.
    Zheng, X. J.
    ASICON 2007: 2007 7TH INTERNATIONAL CONFERENCE ON ASIC, VOLS 1 AND 2, PROCEEDINGS, 2007, : 1050 - 1053
  • [9] Effect of leakage current through ferroelectric and insulator on retention characteristics of metal-ferroelectric-insulator-semiconductor structure
    Takahashi, Mitsue
    Kodama, Kazushi
    Nakaiso, Toshiyuki
    Noda, Minoru
    Okuyama, Masanori
    2001, Taylor and Francis Inc., 325 Chestnut St, Suite 800, Philadelphia PA, PA 19106, United States (40) : 1 - 5
  • [10] A Compact Model of Metal-Ferroelectric-Insulator-Semiconductor Tunnel Junction
    Tung, Chien-Ting
    Pahwa, Girish
    Salahuddin, Sayeef
    Hu, Chenming
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2022, 69 (01) : 414 - 418