First observed in gaseous plasmas in the early 1960's, helicon discharges lay like a sleeping giant until they emerged in the 1980's, when their usefulness as efficient plasma sources for processing microelectronic circuits for the burgeoning semiconductor industry became recognized, Research on helicons spread to many countries; new, challenging, unexpected problems arose, and these have spawned solutions and novel insights into the physical mechanisms in magnetized radio-frequency discharges, Among the most baffling puzzles were the reason for the high ionization efficiency of helicon discharges and the dominance of the right-hand polarized mode over the left-hand one, The most recent results indicate that a nonobvious resolution of these problems is at hand.
机构:
Chinese Univ Hong Kong, Dept Med & Therapeut, Hong Kong 85226323133, Peoples R ChinaChinese Univ Hong Kong, Dept Med & Therapeut, Hong Kong 85226323133, Peoples R China
Ko, Fanny Wai San
Fleming, Louise
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机构:
Imperial Coll, Natl Heart & Lung Inst, London, EnglandChinese Univ Hong Kong, Dept Med & Therapeut, Hong Kong 85226323133, Peoples R China
机构:
Tulane Law School, Admiralty Law Inst, Maritime Law, New Orleans, LA 70118 USA
Tulane Law School, Maritime Law Ctr, New Orleans, LA 70118 USATulane Law School, Admiralty Law Inst, Maritime Law, New Orleans, LA 70118 USA