Diagnostic technique of gas jet for debris-free laser-plasma EUV source

被引：0
|
作者：
Bobashev, SV [1 ]
de Bruijn, R [1 ]
Kopytova, TG [1 ]
Kurakin, YA [1 ]
Schmidt, AA [1 ]
Stepanova, ZA [1 ]
Tumakaev, GK [1 ]
机构：
[1] Ioff Inst, St Petersburg, Russia
来源：
EMERGING LITHOGRAPHIC TECHNOLOGIES IV | 2000年 / 3997卷
关键词：
EUV lithography; debris-free laser plasma source; laser produced plasma; gas jet target;
D O I：
10.1117/12.390118
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Gas target parameters are determined both experimentally and by numerical simulation. A new experimental setup was built to produce a supersonic gas jet to implant schlieren photography to investigate the gas jet. A numerical study was also performed to estimate parameters of the jets and effects of nozzle shapes, pressure ratio as well as working and ambient gas parameters. Effect of homogeneous nucleation and micro-droplets formation in the expanding jet was taking into account. The developed approach demonstrates good efficiency, flexibility and accuracy. It enables one to consider nozzle starting processes with shocked flows characterized by complicated structure and phase transfer processes. Jet structure and parameters (density, velocity and temperature fields) were determined as well as fraction of condensed matter and micro-drop parameters.
引用
收藏
页码：777 / 783
页数：7
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