Electrically and thermally tunable multifunctional terahertz metasurface array

In this paper we propose a kind of all-solid-state and a hybrid electrically and thermally tunable multifunctional metasurface array based on the graphene pattern and vanadium dioxide configuration, which can realize the functions of band-stop filtering, beam steering, and beam splitting. When VO2 is in the dielectric state, this metasurface can be used as an angle-insensitive filter that can realize the function of the dual-frequency adjustable band-stop filtering by changing the Fermi level of graphene in the range of 4.11-6.51 THz. When VO2 is in the metal state, this metasurface can be used as a terahertz phased array device. By changing the Fermi level of graphene and the phase distribution, it is proved that this metasurface can achieve a specific deflection angle, a continuous scanning range of 0-68.37 degrees, or beam splitting at angles of +/- 25.56 degrees and +/- 59.29 degrees. Our work shows great potential in the field of multifunctional integrated chips.