Deposition of oxide thin films on silicon using organic self-assembled monolayers

被引：8
|
作者：
DeGuire, MR [1 ]
Shin, HJ [1 ]
Collins, R [1 ]
Agarwal, M [1 ]
Sukenik, CN [1 ]
Heuer, AH [1 ]
机构：
[1] CASE WESTERN RESERVE UNIV,DEPT MAT SCI & ENGN,CLEVELAND,OH 44106
来源：
INTEGRATED OPTICS AND MICROSTRUCTURES III | 1996年 / 2686卷
关键词：
thin films; oxide films; liquid-phase deposition; self-assembled monolayers; microstructural characterization; electrical properties;
D O I：
10.1117/12.236127
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：88 / 99
页数：12
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