Overview and Analysis of Readout Circuits for Capacitive Sensing in MEMS Gyroscopes (MEMS Angular Velocity Sensors)

被引：0
|
作者：
Lobur, Mykhaylo [1 ]
Holovatyy, Andriy [1 ]
机构：
[1] Lviv Polytech Natl Univ, Dept CAD Syst, UA-79013 Lvov, Ukraine
来源：
MEMSTECH: 2009 INTERNATIONAL CONFERENCE ON PERSPECTIVE TECHNOLOGIES AND METHODS IN MEMS DESIGN | 2009年
关键词：
MEMS (MicroElectroMechanical Systems); MEMS gyroscope; capacitive sensing circuit; continous-time voltage sensing; switched-capacitor charge integrator for capacitive sensing; continuous-time current-mode capacitive sensing; continuous-time voltage-mode capacitive ensing; chopper stabilized capacitive readout amplifier;
D O I：
暂无
中图分类号：
TP301 [理论、方法];
学科分类号：
081202 ;
摘要：
In the article, overview and analysis of the performance of capacitive sensing circuits for MEMS gyroscopes are presented. Their performance, advantages and disadvantages are given. The low-noise chopper stabilized readout circuit for capacitive measurements in MEMS gyroscopes is proposed.
引用
收藏
页码：149 / 151
页数：3
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