共 50 条
- [24] Cluster primary ion beam secondary ion mass spectrometry for semiconductor characterization CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2000, INTERNATIONAL CONFERENCE, 2001, 550 : 687 - 691
- [25] Negative cesium sputter ion source for generating cluster primary ion beams for secondary ion mass spectrometry analysis JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2001, 19 (02): : 568 - 575
- [26] IMPROVEMENTS IN CHEMISTRY OF SECONDARY ION MASS-SPECTROMETRY - NEGATIVE-ION TECHNIQUES NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3): : 567 - 567
- [30] Secondary ion mass spectrometry New Developments in Mass Spectrometry, 2015, 2015-January (03): : 439 - 499