Compact permanent magnet H+ ECR ion source with pulse gas valve

被引：1
|
作者：
Iwashita, Y. [1 ]
Tongu, H. [1 ]
Fuwa, Y. [1 ]
Ichikawa, M. [2 ]
机构：
[1] Kyoto Univ, Inst Chem Res, Uji, Kyoto 6110011, Japan
[2] Japan Atom Res Agcy, Naka, Ibaraki 3110193, Japan
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 2016年 / 87卷 / 02期
关键词：
PROTON SOURCE;
D O I：
10.1063/1.4934619
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Compact H+ ECR ion source using permanent magnets is under development. Switching the hydrogen gas flow in pulse operations can reduce the gas loads to vacuum evacuation systems. A specially designed piezo gas valve chops the gas flow quickly. A 6 GHz ECR ion source equipped with the piezo gas valve is tested. The gas flow was measured by a fast ion gauge and a few ms response time is obtained. (C) 2015 AIP Publishing LLC.
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页数：3
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