A method for computing ion energy distributions for multifrequency capacitive discharges

被引：46
|
作者：
Wu, Alan C. F. [1 ]
Lieberman, M. A.
Verboncoeur, J. P.
机构：
[1] Univ Calif Berkeley, Dept Nucl Engn, Berkeley, CA 94720 USA
[2] Univ Calif Berkeley, Dept Elect Engn, Berkeley, CA 94720 USA
来源：
JOURNAL OF APPLIED PHYSICS | 2007年 / 101卷 / 05期
关键词：
D O I：
10.1063/1.2435975
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The ion energy distribution (IED) at a surface is an important parameter for processing in multiple radio frequency driven capacitive discharges. An analytical model is developed for the IED in a low pressure discharge based on a linear transfer function that relates the time-varying sheath voltage to the time-varying ion energy response at the surface. This model is in good agreement with particle-in-cell simulations over a wide range of single, dual, and triple frequency driven capacitive discharge excitations. (c) 2007 American Institute of Physics.
引用
收藏
页数：3
相关论文
共 50 条
  • [31] Ion energy distributions in bipolar pulsed-dc discharges of methane measured at the biased cathode
    Corbella, C.
    Rubio-Roy, M.
    Bertran, E.
    Portal, S.
    Pascual, E.
    Polo, M. C.
    Andujar, J. L.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2011, 20 (01):
  • [32] Ion energy and angular distributions into the wafer-focus ring gap in capacitively coupled discharges
    Babaeva, Natalia Y.
    Kushner, Mark J.
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2008, 41 (06)
  • [33] Ion energy distributions for the identification of active species and processes in low pressure hollow cathode discharges
    Tanarro, I.
    Herrero, V. J.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2009, 18 (03):
  • [34] Lecture notes on radio-frequency discharges, dc potentials, ion and electron energy distributions
    Goedheer, WJ
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2000, 9 (04): : 507 - 516
  • [35] Ion energy distributions, electron temperatures, and electron densities in Ar, Kr, and Xe pulsed discharges
    Shin, Hyungjoo
    Zhu, Weiye
    Economou, Demetre J.
    Donnelly, Vincent M.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2012, 30 (03):
  • [36] Ion energy distributions
    Kroesen, GMW
    van de Grift, M
    Snijkers, RJMM
    de Hoog, FJ
    ADVANCED TECHNOLOGIES BASED ON WAVE AND BEAM GENERATED PLASMAS, 1999, 67 : 149 - 173
  • [37] Ion energy distribution function in very high frequency capacitive discharges excited by saw-tooth waveform
    Sharma, Sarveshwar
    Sirse, Nishant
    Kuley, Animesh
    Turner, Miles M.
    PHYSICS OF PLASMAS, 2021, 28 (10)
  • [38] PRESSURE AND FREQUENCY-DEPENDENCE OF ION-BOMBARDMENT ENERGY-DISTRIBUTIONS FROM RF DISCHARGES
    TOUPS, MF
    ERNIE, DW
    JOURNAL OF APPLIED PHYSICS, 1990, 68 (12) : 6125 - 6132
  • [39] Ion and neutral energy flux distributions to the cathode in glow discharges in Ar/Ne and Xe/Ne mixtures
    Capdeville, H
    Pédoussat, C
    Pitchford, LC
    JOURNAL OF APPLIED PHYSICS, 2002, 91 (03) : 1026 - 1030
  • [40] METHOD OF COMPUTING MULTIFREQUENCY CIRCULAR DIPOLE ANTENNA-ARRAYS
    ILYINSKY, AS
    PONOMAREYV, LI
    RADIOTEKHNIKA I ELEKTRONIKA, 1982, 27 (05): : 900 - 902
12345