Some Features of the Formation of Structure and Properties of Transition Metal Diboride and Boronitride Films

被引：3

作者：

Goncharov, A. A. ^{[1
]}

Agulov, A. V. ^{[1
]}

Petukhov, V. V. ^{[1
]}

机构：

[1] Donbass State Machine Bldg Acad, UA-84313 Kramatorsk, Ukraine

来源：

TECHNICAL PHYSICS LETTERS | 2009年 / 35卷 / 12期

关键词：

TANTALUM BORIDE FILMS; MECHANICAL-PROPERTIES; NANOSTRUCTURED FILMS; NITRIDE FILMS; B-N; COATINGS; STRESS;

D O I：

10.1134/S1063785009120207

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The formation of structure and the development of mechanical properties in films of transition metal diborides (MeB2) and boronitrides (MeBN) grown by rf magnetron sputtering have been studied. The most characteristic features are (i) the formation of a columnar structure and axial texture on (00.1) planes in MeB2 films grown by nonreactive magnetron sputtering and (ii) the formation of a composite that consists of a nanocrystalline MeB2 phase and an amorphous BN phase in films grown by the reactive sputtering in Ar + N-2 gas mixtures.

引用

页码：1140 / 1143

页数：4

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