Laser excess noise reduction in optical phase-shift measurements

被引：7
|
作者：
Mitrofanov, O [1 ]
机构：
[1] Bell Labs, Lucent Technol, Murray Hill, NJ 07974 USA
来源：
APPLIED OPTICS | 2003年 / 42卷 / 14期
关键词：
D O I：
10.1364/AO.42.002526
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We describe an optical detection scheme that reduces laser excess noise in measurements of small optical phase shifts. The scheme improves the sensitivity of the balanced differential detection. Analysis of the scheme and comparison with the conventional detection are presented. The scheme is applied in electro-optic probing of electrical signals in integrated circuits, where the excess laser noise is reduced by similar to20 dB. (C) 2003 Optical Society of America.
引用
收藏
页码：2526 / 2531
页数：6
相关论文
共 50 条
  • [41] Development of optical component for EUV phase-shift microscopes
    Mizuta, Yoshio
    Osugi, Masafumi
    Kishimoto, Jyunki
    Sakaya, Noriyuki
    Hamamoto, Kazuhiro
    Watanabe, Takeo
    Kinoshita, Hiroo
    EMERGING LITHOGRAPHIC TECHNOLOGIES XI, PTS 1 AND 2, 2007, 6517
  • [42] FINE LINE OPTICAL LITHOGRAPHY BY PHASE-SHIFT MASKS
    MARSHALL, SL
    SOLID STATE TECHNOLOGY, 1983, 26 (05) : 117 - 117
  • [43] Optical phase-shift detection of surface plasmon resonance
    Shen, SA
    Liu, T
    Guo, JH
    APPLIED OPTICS, 1998, 37 (10): : 1747 - 1751
  • [44] COMPARATIVE NOISE IMMUNITIES OF AMPLITUDE FREQUENCY AND PHASE-SHIFT TELEGRAPHY
    KHVOROST.NP
    TELECOMMUNICATIONS AND RADIO ENGINEER-USSR, 1966, (06): : 1 - &
  • [45] Avalanche-photodiode-based heterodyne optical head of a phase-shift laser range finder
    Castagnet, D.
    Tap-Beteille, H.
    Lescure, M.
    OPTICAL ENGINEERING, 2006, 45 (04)
  • [46] NEW PHASE-SHIFT PARAMETRIZATION BASED ON A PHASE-SHIFT DISPERSION RELATION
    COULTER, PW
    PHYSICAL REVIEW, 1968, 167 (05): : 1352 - &
  • [47] THE PHASE-SHIFT METHOD APPLIED TO CROSS GRATING MOIRE MEASUREMENTS
    ANDRESEN, K
    KLASSEN, D
    OPTICS AND LASERS IN ENGINEERING, 1986, 7 (02) : 101 - 114
  • [48] VARIOUS APPARATUS FOR HIGH-FREQUENCIES PHASE-SHIFT MEASUREMENTS
    DZIADOWIEC, A
    LESCURE, M
    BOUCHER, J
    ONDE ELECTRIQUE, 1983, 63 (6-7): : 52 - 56
  • [49] PHASE-SHIFT ERRORS IN THE THEORY AND PRACTICE OF SURFACE INTENSITY MEASUREMENTS
    MCGARY, MC
    CROCKER, MJ
    JOURNAL OF SOUND AND VIBRATION, 1982, 82 (02) : 275 - 288
  • [50] Absolute reflectance measurements by a modified cavity phase-shift method
    Mogg, S
    Chitica, N
    Plaine, G
    Hammar, M
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2002, 73 (04): : 1697 - 1701
12345