STUDY OF CERTIFIED REFERENCE MATERIAL PREPARATION TECHNIQUE FOR MICROELECTRONIC DIGITAL CIRCUITS

This paper introduces an alternative method to traditional certified reference material (CRM) preparation technique for microelectronic digital circuits. Instead of self-manufacturing chips, a novel preparation technique is introduced which selects matured samples as the CRMs, these samples are also called certified reference samples (CRSs). The use of CRS not only greatly reduces the difficulties of preparation, but also brings microelectronic CRM preparation technique to a new domain. Finally, the preparation contents and methods, the preparation processes, as well as the maintenance, preservation and usage of the CRS are discussed in detail in this paper.