Multi-axis micromirror for optical coherence tomography

被引：1

作者：

Izhar, Umer ^{[1
]}

Ooi, Boon S. ^{[2
]}

Tatic-Lucic, Svetlana ^{[1
]}

机构：

[1] Lehigh Univ, Dept Elect & Comp Engn, Sherman Fairchild Ctr, Bethlehem, PA 18015 USA

[2] Lehigh Univ, Dept Elect & Comp Engn, Ctr Opt Technol, Bethlehem, PA 18015 USA

来源：

PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE | 2009年 / 1卷 / 01期

关键词：

Micromirror; OCT imaging; Optical Scanner; Multi-axis mirror; Electrothermal Actuator; Angular Deflection;

D O I：

10.1016/j.proche.2009.07.286

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

In this paper we describe for the first time the design, fabrication and initial characterization results of a novel gimbal-less, thermally actuated micromirror developed for optical coherence tomography (OCT) application. We report large deflection angle of up to 30 degrees that has been achieved at low input power of less than 17mW and voltage of less than 1V. Moreover, this device has a potential of integration with GaAs/Si substrate due to moderate temperatures developed during its operation-less than 100 degrees C increase with respect to ambient at angular deflection of 30(degrees).

引用

页码：1147 / +

页数：2

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