Multi-axis micromirror for optical coherence tomography

In this paper we describe for the first time the design, fabrication and initial characterization results of a novel gimbal-less, thermally actuated micromirror developed for optical coherence tomography (OCT) application. We report large deflection angle of up to 30 degrees that has been achieved at low input power of less than 17mW and voltage of less than 1V. Moreover, this device has a potential of integration with GaAs/Si substrate due to moderate temperatures developed during its operation-less than 100 degrees C increase with respect to ambient at angular deflection of 30(degrees).