Ultra-hard Ti-B-N coatings obtained by magnetron sputtering

被引：23
|
作者：
Heau, C
Guillon, N
Fillit, RY
Machet, J
机构：
[1] Hydromecan & Frottement, F-42026 Andrezieux Boutheon, France
[2] Ecole Natl Super Mines, F-42023 St Etienne, France
[3] Fac Sci, LMCTS Grp PVD, F-87060 Limoges, France
来源：
SURFACE & COATINGS TECHNOLOGY | 1997年 / 97卷 / 1-3期
关键词：
mechanical properties; reactive magnetron co-sputtering; titanium boronitride;
D O I：
10.1016/S0257-8972(97)00191-6
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Titanium boronitride coatings were deposited by reactive magnetron cosputtering. The Ti and the TiB2 targets were sputtered by using an Ar-N-2 gas mixture. The deposition configuration allowed us to obtain a composition gradient along the substrate length. The coatings have been characterized by reflectivity measurements and X-ray diffraction while, for mechanical applications, scratch tests, hardness indentations and wear tests were used. The zone explored in the Ti-B-N diagram shows very different behavior with chemical composition. Coatings 10 mu m thick with 6000 HV hardness exhibit wear rates nine times lower than those of TIN coatings. (C) 1997 Elsevier Science S.A.
引用
收藏
页码：60 / 65
页数：6
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