Theoretical and experimental investigation on electrochemical micromachining

被引：32
|
作者：
Zhang, Zhaoyang [1 ]
Zhu, Di [1 ]
Qu, Ningsong [1 ]
Wang, Minghuan [1 ]
机构：
[1] Nanjing Univ Aeronaut & Astronaut, Nanjing 210016, Peoples R China
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2007年 / 13卷 / 07期
关键词：
D O I：
10.1007/s00542-006-0369-7
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Based on the principle of electrochemical reactions, the mechanism of electrochemical micromachining with ultra short voltage pulses was investigated and the theoretical model was developed. The effects of electrode gap and pulse parameters on the result of electrochemical micromachining were discussed. Using the self-developed experimental system, microtool-electrode and the complex microstructures were sequentially machined. Upon the application of ultrashort voltage pulses, the troughs with 20 mu m in width were fabricated by phi 10 mu m tool electrode produced.
引用
收藏
页码：607 / 612
页数：6
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