In-situ xrd-investigation of electrolytic copper layer

被引：2

作者：

Schneider, M. ^{[1
]}

Weiser, M. ^{[1
]}

Matthey, B. ^{[1
]}

Herrmann, M. ^{[1
]}

机构：

[1] Fraunhofer IKTS Dresden, Winterbergstr 28, D-01277 Dresden, Germany

来源：

APPLIED SURFACE SCIENCE | 2018年 / 457卷

关键词：

Electrolytic deposition; Microstructure; In-situ x-ray diffraction; X-RAY-DIFFRACTION; ELECTROPLATED COPPER; ELECTRODEPOSITED COPPER; CURRENT-DENSITY; INITIAL-STAGES; MICROSTRUCTURE; DEPOSITION; CU; TEMPERATURE; PARAMETERS;

D O I：

10.1016/j.apsusc.2018.06.175

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The present work investigates the approach of the in-situ investigation of the microstructure of electrolytic deposited metal layers by using a conventional x-ray diffractometer. The used electrochemical x-ray cell used allows the reduction of the electrolytic film thickness during the x-ray diffraction to avoid a significant reducing of intensity caused by diffuse scattering. The results reveals the microstructure development of copper layers depending on the layer thickness and the deposition potential. The avoidance of any contamination with an ambient atmosphere and the continuously potential control guarantees steady conditions of the sample surface between the deposition steps and during the diffraction measurement.

引用

页码：815 / 820

页数：6

共 50 条

[11] In-situ investigation of surface layers during gaseous nitriding by means of XRD and photothermal radiometry
Dong J.
Prekel H.
Dethlefs M.
Epp J.
Fischer A.
[J]. HTM - Journal of Heat Treatment and Materials, 2017, 72 (03): : 154 - 167
[12] In-situ Synchrotron XRD Studies of Combustion Processes
Artioli, Gilberto
[J]. ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES, 2005, 61 : C87 - C87
[13] Kinetics of the formation of PLZT: An in-situ XRD study
Roberts, MA
Sankar, G
Catlow, CRA
Thomas, JM
Greaves, GN
Jones, RH
[J]. EUROPEAN POWDER DIFFRACTION: EPDIC IV, PTS 1 AND 2, 1996, 228 : 417 - 421
[14] In-situ XRD as a tool to understanding zeolite crystallization
Norby, Poul
[J]. CURRENT OPINION IN COLLOID & INTERFACE SCIENCE, 2006, 11 (2-3) : 118 - 125
[15] Kinetics of the formation of PLZT: An in-situ XRD study
Royal Inst of Great Britain, London, United Kingdom
[J]. Mater Sci Forum, pt 1 (417-422):
[16] In-situ synthesis of copper azide chips and investigation of their initiation ability
Wu, Xingyu
Li, Mingyu
Zeng, Qingxuan
Hao, Yingnan
Ren, Jie
[J]. CHEMICAL ENGINEERING JOURNAL, 2022, 427
[17] Investigation of the order -disorder phase transition series in AuCu by in-situ temperature XRD and mechanical spectroscopy
Lamiri, Imene
Martinez-Blanco, David
Abdelbaky, Mohammed S. M.
Mari, Daniele
Hamana, Djamel
Garcia-Granda, Santiago
[J]. JOURNAL OF ALLOYS AND COMPOUNDS, 2019, 770 : 748 - 754
[18] Investigation of CaO-CO2 reaction kinetics by in-situ XRD using synchrotron radiation
Biasin, A.
Segre, C. U.
Salviulo, G.
Zorzi, F.
Strumendo, M.
[J]. CHEMICAL ENGINEERING SCIENCE, 2015, 127 : 13 - 24
[19] THE ANODE LAYER IN THE ELECTROLYTIC POLISHING OF COPPER
WALTON, HF
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1950, 97 (07) : 219 - 226
[20] In-Situ XRD Stress Analysis during Expansion of Stents
Kowalski, Wolfgang
Dammer, Markus
Bakczewitz, Frank
Kessler, Olaf
[J]. INTERNATIONAL CONFERENCE ON RESIDUAL STRESSES 9 (ICRS 9), 2014, 768-769 : 406 - +

← 1 2 3 4 5 →